Aimed at the problems of a large equipment size, long time and high price of environmental VOC gas detection, the FAIMS-VOC gas sensor was designed and prepared according to the principle that the ionization energy of the common VOC gas is less than 10.6 eV. The sensor is small in size, fast in detection, low in power consumption, and can work continuously. The sensor was fabricated through the MEMS process, a specific process which included photolithography, etching, anodic bonding, etc. The sensor is 5160 μm long, 5300 μm wide and 800 μm high. We built a test system to detect two typical VOC gases: isobutylene and acetone. The results show that in the detection of isobutylene gas and acetone gas, the sensor voltage value changes with the change of gas concentration. The linearity of testing isobutylene is 0.961, and the linearity of testing acetone is 0.987. When the isobutylene gas concentration is 50 ppm, the response time is 8 s and the recovery time is 6 s; when the acetone gas concentration is 50 ppm, the response time is 9 s and the recovery time is 10 s. In addition, the sensor demonstrates good repeatability and stability, which are conducive to the detection of VOCs in the environment.
Keywords: FAIMS; MEMS; VOC gas detection; anodic bonding; gas sensor.