Fused silica is prone to damage under ultraviolet laser irradiation. Because they are key components to achieve fusion on high energy laser facilities, final fused silica optics are analyzed after each laser shot. The quantification of damage sites is limited by the image resolution. Measurements of scattered light by damage sites allow for sub-pixel detection and growth monitoring after a calibration step based on time-consuming measurements at laser facilities. It is proven herein that modeling laser damage size monitoring based on light scattering is efficient to link gray levels to damage diameters, thereby avoiding any experimental calibration based on reference optics at the facility.