There is a constraint between the dynamic range and the bandwidth of MEMS accelerometers. When the input acceleration is comparatively large, the squeeze film damping will increase dramatically with the increase in the oscillation amplitude, resulting in a decrease in bandwidth. Conventional models still lack a complete vibration response analysis in large amplitude ratios and cannot offer a suitable guide in the optimization of such devices. In this paper, the vibration response analysis of the sensing unit of an accelerometer in large amplitude ratios is first completed. Then, the optimal design of the sensing unit is proposed to solve the contradiction between the dynamic range and the bandwidth of the accelerometer. Finally, the results of the vibration experiment prove that the maximum bandwidth can be achieved with 0~10g external acceleration, which shows the effectiveness of the design guide. The new vibration analysis with the complete model of squeeze film damping is applicable to all sensitive structures based on vibration, not limited to the MEMS accelerometer studied in this thesis. The bandwidth optimal scheme also provides a strong reference for similar structures with large oscillation amplitude ratios.
Keywords: MEMS accelerometer; amplitude effect; bandwidth optimization; squeeze film damping.