In recent years, many research achievements in the field of anodic aluminum oxide (AAO) membranes can be observed. Nevertheless, it is still an interesting research topic due to its high versatility and applications in various fields, such as template-assisted methods, filtration, sensors, etc. Nowadays, miniaturization is an integral part of different technologies; therefore, research on micro- and nanosized elements is relevant in areas such as LEDs and OLEDs, solar cells, etc. To achieve an efficient mixing process of fluid flow in straight nanopores, acoustofluidic physics has attracted great interest in recent decades. Unfortunately, the renewal of the electrolyte concentration at the bottom of a pore is limited. Thus, excitation is used to improve fluid mixing along nanosized diameters. The effect of excitation by high-frequency vibrations on pore geometry is also investigated. In this study, theoretical simulations were performed. Using theoretical calculations, the acoustic pressure, acoustic velocity, and velocity magnitude were obtained at frequencies of 2, 20, and 40 kHz. Moreover, nanoporous AAO membranes were synthesized, and the influence of high-frequency vibrations on the geometry of the pores was determined. Using a high-frequency excitation of 20 kHz, the thickness of the AAO membrane increased by 17.8%. In addition, the thickness increased by 31.1% at 40 kHz and 33.3% at the resonant frequency of 40 kHz. Using high-frequency vibrations during the anodization process, the electrolyte inside the pores is mixed, and as a result, a higher oxide growth rate and a deeper structure can be achieved. On the other hand, to obtain pores of the same depth, the reaction can be performed in a shorter time.
Keywords: AAO nanoporous membrane; high-frequency excitation method; two-step anodization method.