A wireless flexible air velocity microsensor was developed by using micro-electro-mechanical systems (MEMS) technology. Polyimide (PI) material was selected for the waterproof and oilproof requirements of the cold air duct environment of heating, ventilation, and air conditioning (HVAC) systems, and then a wireless flexible micro air velocity sensor was completed. To obtain real-time wireless measurements of the air velocity inside the cold air ducts of an HVAC system, and to create a measurements database, the deployment locations and quantity of micro air velocity sensors for the internal environment of the cold air ducts were planned. A field domain verification was performed to optimize the internal environment control of the cold air ducts of ventilation and air conditioning systems and to enhance the quality and reliability of process materials. This study realized real-time monitoring of velocity in the HVAC ducts of a chemical-fiber plant. A commercial velocity sensor (FS7.0.1L.195) was purchased and a micro-electro-mechanical systems (MEMS) approach was also used to develop a home-built micro air velocity sensor, to optimize the provision of the commercial sensors and our home-built micro air velocity sensor. Comparing the specifications of the two commercially available sensors with our home-built micro air velocity sensor, the results show that the home-built micro air velocity sensor has the advantages of fast response time, simultaneous sensing of three important physical quantities, and low cost.
Keywords: heating; micro air velocity sensor; ventilation and air conditioning.