In this paper, a novel optical MEMS accelerometer is proposed based on evanescent coupling between parallel silicon nanowaveguides. The coupling length between nanowaveguides changes due to the input acceleration, leading to a great change of coupling efficiency. As a result, the applied acceleration can be obtained by measuring the transmission of waveguiding light. Simulation results with optical displacement sensing sensitivity of 32.83%/[Formula: see text]m within measurement range of 1.68 g is obtained. This design shows high compactness with no need of assembly, suggesting great potential in applications such as integrated photonic circuits.
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