Water molecules play a very important role in the hydration and dehydration process of hydrates, which may lead to distinct physical and chemical properties, affecting their availability in practical applications. However, miniaturized, integrated sensors capable of the rapid, sensitive sensing of water molecules in the hydrate are still lacking, limiting their proliferation. Here, we realize the high-sensitivity sensing of water molecules in copper sulfate pentahydrate (CuSO4·5H2O), based on an on-chip terahertz whispering gallery mode resonator (THz-WGMR) fabricated on silicon material via CMOS-compatible technologies. An integrated THz-WGMR with a high-Q factor of 3305 and a resonance frequency of 410.497 GHz was proposed and fabricated. Then, the sensor was employed to distinguish the CuSO4·xH2O (x = 5, 3, 1). The static characterization from the CuSO4·5H2O to the copper sulfate trihydrate (CuSO4·3H2O) experienced blueshifts of 0.55 GHz/μmol, whereas the dehydration process of CuSO4·3H2O to copper sulfate monohydrate (CuSO4·H2O) exhibited blueshifts of 0.21 GHz/μmol. Finally, the dynamic dehydration processes of CuSO4·5H2O to CuSO4·3H2O at different temperatures were monitored. We believe that our proposed THz-WGMR sensors with highly sensitive substance identification capabilities can provide a versatile and integrated platform for studying the transformation between substances, contributing to hydrated/crystal water-assisted biochemical applications.
Keywords: crystalline hydrate; dehydration; sensing; terahertz (THz); whispering gallery mode (WGM).