Large-Scale MoS2 Pixel Array for Imaging Sensor

Kang Liu; Xinyu Wang; Hesheng Su; Xinyu Chen; Die Wang; Jing Guo; Lei Shao; Wenzhong Bao; Honglei Chen

doi:10.3390/nano12234118

Large-Scale MoS₂ Pixel Array for Imaging Sensor

Nanomaterials (Basel). 2022 Nov 22;12(23):4118. doi: 10.3390/nano12234118.

Authors

Kang Liu¹, Xinyu Wang¹, Hesheng Su¹, Xinyu Chen¹, Die Wang¹, Jing Guo¹, Lei Shao², Wenzhong Bao¹, Honglei Chen³

Affiliations

¹ State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China.
² School of Electronic Information, Soochow University, Suzhou 215006, China.
³ Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China.

Abstract

Two-dimensional molybdenum disulfide (MoS₂) has been extensively investigated in the field of optoelectronic devices. However, most reported MoS₂ phototransistors are fabricated using the mechanical exfoliation method to obtain micro-scale MoS₂ flakes, which is laboratory- feasible but not practical for the future industrial fabrication of large-scale pixel arrays. Recently, wafer-scale MoS₂ growth has been rapidly developed, but few results of uniform large-scale photoelectric devices were reported. Here, we designed a 12 × 12 pixels pixel array image sensor fabricated on a 2 cm × 2 cm monolayer MoS₂ film grown by chemical vapor deposition (CVD). The photogating effect induced by the formation of trap states ensures a high photoresponsivity of 364 AW^-1, which is considerably superior to traditional CMOS sensors (≈0.1 AW^-1). Experimental results also show highly uniform photoelectric properties in this array. Finally, the concatenated image obtained by laser lighting stencil and photolithography mask demonstrates the promising potential of 2D MoS₂ for future optoelectrical applications.

Keywords: molybdenum disulfide (MoS2); photo sensor; two-dimensional (2D) semiconductors.

Grants and funding

This research was funded by the National Key Research and Development Program (Grant No. 2021YFA1200500), in part by the Innovation Program of Shanghai Municipal Education Commission (Grant No. 2021-01-07-00-07-E00077), and Shanghai Municipal Science and Technology Commission (Grant No. 21DZ1100900). We also thank the support of the young scientist project from the MOE innovation platform.