Hybrid mode atomic force microscopy of phase modulation and frequency modulation

Tatsuya Yamamoto; Masato Miyazaki; Hikaru Nomura; Yan Jun Li; Yasuhiro Sugawara

doi:10.1093/jmicro/dfac057

Hybrid mode atomic force microscopy of phase modulation and frequency modulation

Microscopy (Oxf). 2023 Jun 8;72(3):236-242. doi: 10.1093/jmicro/dfac057.

Authors

Tatsuya Yamamoto¹, Masato Miyazaki¹, Hikaru Nomura², Yan Jun Li¹, Yasuhiro Sugawara¹

Affiliations

¹ Department of Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.
² Department of Materials Engineering Science, Graduate School of Engineering Science, Osaka University, 1-3 Yachinake-yama, Toyonaka, Osaka 560-0043, Japan.

PMID: 36322406
DOI: 10.1093/jmicro/dfac057

Abstract

We propose hybrid phase modulation (PM)/frequency modulation (FM) atomic force microscopy (AFM) to increase the imaging speed of AFM in high-Q environments. We derive the relationship between the phase shift, the frequency shift and the tip-sample interaction force from the equation of motion for the cantilever in high-Q environments. The tip-sample conservative force is approximately given by the sum of the conservative force with respect to the phase shift in the PM mode and that with respect to the frequency shift in the FM mode. We preliminarily demonstrate that the hybrid PM/FM-AFM is a new and very promising AFM operation mode that can increase imaging speed.

Keywords: atomic force microscopy; frequency modulation; hybrid mode; phase modulation.

MeSH terms

Microscopy, Atomic Force* / methods