Modern electronic devices, such as smartphones and electric vehicles, require multilayer ceramic capacitors (MLCCs), which comprise highly pure Cu terminations and Ni electrodes. Vapor-phase synthesis (VPS) is a promising method for synthesizing nanoparticles (NPs) with high purity and crystallinity. However, the agglomeration of the NPs occurs during their synthesis, which degrades the performance of the MLCC electrodes owing to several factors, including electrical shorts and low packing density. This paper proposes a coating-assisted VPS to inhibit agglomeration using potassium chloride (KCl) as the coating agent. The agglomeration ratio of the Cu NPs synthesized by in-flight coating with KCl at 950 °C significantly decreased from 48.20% to 3.80%, compared to without KCl coating. Furthermore, X-ray fluorescence and X-ray diffraction analyses confirmed that the KCl coating agent and residual copper chloride were removed by washing with ammonium hydroxide.
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