All-dielectric metasurfaces have been attracting attention in the terahertz spectral range for low-loss planar optical elements such as lenses, beam splitters, waveplates, vortex plates, and magnetic mirrors. Various shapes of meta-atoms have been used in many studies; however, no systematic comparative study of each shape has been reported. The optical properties of various shapes of metasurfaces are reported in this work using finite difference time domain simulation. The phase of a pillar-type all-dielectric metasurface is mainly determined by the cross-sectional area, rather than its detailed shape. Consequently, in the square lattice geometry, the square shape meta-atom performs best in terms of full phase control at the lowest pillar height with negligible polarization dependence. Furthermore, we compare the transmission, phase, and polarization dependence of the hexagonal and square lattices. Square-shape metasurface successfully realizes subwavelength focusing metalens and vortex plate.