The absorption coefficient of fused silica for a mid-infrared (IR) laser is higher than that for a near-IR laser, but smaller than that for a far-IR laser. Therefore, the energy coupling efficiency of the mid-IR laser is higher than that for the near-IR laser, while the penetration depth is higher than that for the far-IR laser. Thus, the mid-IR laser is highly efficient in mitigating damage growth. In this study, a deuterium fluoride (DF) laser with a center wavelength of 3.8 µm was used to interact with fused silica. The temperature variation, changes in the reflected and transmitted intensities of the probe light incident on the laser irradiation area, and the vaporization and melting sputtering process were analyzed. The results demonstrate that when the laser intensity was low (<1.2 kW/cm2), no significant melting was observed, and the reflection and transmission properties gradually recovered after the end of the laser irradiation process. With a further increase in the laser intensity, the sample gradually melted and vaporized. At a laser intensity above 5.1 kW/cm2, the temperature of the sample increased rapidly and vapors in huge quantity evaporated from the surface of the sample. Moreover, when the laser intensity was increased to 9.5 kW/cm2, the sample melted and an intense melting sputtering process was observed, and the sample was melted through.