Integrated refractive index sensor based on an AlN-PSiO2 hybrid plasmonic microdisk resonator

Caixia Guo; Chenghao Wang; Tao Ma; Linqing Zhang; Fang Wang

doi:10.1364/AO.458340

Integrated refractive index sensor based on an AlN-PSiO₂ hybrid plasmonic microdisk resonator

Appl Opt. 2022 Jun 10;61(17):4980-4985. doi: 10.1364/AO.458340.

Authors

Caixia Guo, Chenghao Wang, Tao Ma, Linqing Zhang, Fang Wang

PMID: 36256173
DOI: 10.1364/AO.458340

Abstract

In this paper, a microdisk resonator (MDR) based on an AlN-PSiO₂ hybrid plasmonic waveguide (HPW) and its refractive index (RI) sensing characteristics are investigated. The plasmonic characteristics of the MDR based on the AlN-PSiO₂ HPW (APHPW-MDR) in near-infrared wavelengths are studied by using the finite element method. Through the structure parameter optimizations, the propagation length (L_prop) of the APHPW-MDR is ∼165µm, which is ∼2.5 times as long as that of the MDR based on the AlN HPW (AHPW-MDR). The simulation results show that the quality factor (Q) and extinction rate (ER) of the APHPW-MDR are ∼621.3 and ∼30dB, respectively. The RI sensing sensitivity (S) of the RI sensor based on the APHPW-MDR is ∼276.6nm/RIU. The RI sensor based on the APHPW-MDR has wide application prospects in high-performance biochemical sensing, and it can also be used in integrated optical filters, modulators, switches, routers, and delay circuits.