A semiconductor microwave device that generates a series of burst microwaves at a sub-microsecond duration has been successfully used in a breakdown plasma spectrometer in atmospheric conditions. Microwave delivery has been changed to couple the microwave with laser sparks and electric sparks which are typical plasma ignition sources in laser-induced breakdown spectroscopy (LIBS) and spark-induced breakdown spectroscopy (SIBS). A helical antenna was used for the laser spark, while a coaxial antenna was considered more appropriate for the electric spark. The weak and transient sparks in LIBS and SIBS are enlarged by the microwaves which are stably sustained in the air. The microwave's output power and pulse duration are easily controllable, resulting in tunable plasma intensity and sustained production of hydroxyl radicals (OH radicals). Even in continuous-wave operation by microwave, the low-energy system prevented the formation of high-temperature thermal plasma (>10,000 K) without any mechanical cooling system. The microwave-enhanced LIBS (MW-LIBS) and microwave-enhanced SIBS (MW-SIBS) could be applied to optical emission spectroscopy analyses. In analytical applications, MW-SIBS produces no shockwave in contrast with MW-LIBS which is a great advantage in powdered samples. The MW-SIBS successfully analyzed the direct introduction of copper metal powders.