Microflow multi-layer diffraction optical element processed by hybrid manufacturing technology

Opt Express. 2022 Jul 4;30(14):24689-24702. doi: 10.1364/OE.464192.

Abstract

Traditional planar diffractive optical elements (DOEs) are challenged in imaging systems due to diffraction efficiency and chromatic dispersion. In this paper, we have designed a microfluidic diffractive optical element (MFDOE), which is processed by digital micromirror device (DMD) maskless lithography (DMDML) assisted femtosecond laser direct writing (FsLDW). MFDOE is a combination of photoresist-based multi-layer harmonic diffraction surface and liquid, realizing diffraction efficiency of more than 90% in the visible band. And it shows achromatic characteristics in the two bands of 469 nm (±20 nm) and 625 nm (±20 nm). These results show that MFDOE has good imaging performance.