Transition metal dichalcogenide metaphotonic and self-coupled polaritonic platform grown by chemical vapor deposition

Fuhuan Shen; Zhenghe Zhang; Yaoqiang Zhou; Jingwen Ma; Kun Chen; Huanjun Chen; Shaojun Wang; Jianbin Xu; Zefeng Chen

doi:10.1038/s41467-022-33088-0

Transition metal dichalcogenide metaphotonic and self-coupled polaritonic platform grown by chemical vapor deposition

Nat Commun. 2022 Sep 23;13(1):5597. doi: 10.1038/s41467-022-33088-0.

Authors

Fuhuan Shen^#¹, Zhenghe Zhang^#^{2

3}, Yaoqiang Zhou^#¹, Jingwen Ma¹, Kun Chen⁴, Huanjun Chen⁴, Shaojun Wang^{5

6}, Jianbin Xu⁷, Zefeng Chen^{8

9

10}

Affiliations

¹ Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong SAR, P. R. China.
² School of Optoelectronic Science and Engineering and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215006, P. R. China.
³ Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, 215006, P. R. China.
⁴ State Key Lab of Optoelectronic Materials and Technologies, Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou, 510275, P. R. China.
⁵ School of Optoelectronic Science and Engineering and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215006, P. R. China. swang.opto@suda.edu.cn.
⁶ Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, 215006, P. R. China. swang.opto@suda.edu.cn.
⁷ Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong SAR, P. R. China. jbxu@ee.cuhk.edu.hk.
⁸ Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong SAR, P. R. China. zfchen@ee.cuhk.edu.hk.
⁹ School of Optoelectronic Science and Engineering and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215006, P. R. China. zfchen@ee.cuhk.edu.hk.
¹⁰ Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, 215006, P. R. China. zfchen@ee.cuhk.edu.hk.

^# Contributed equally.

Abstract

Transition metal dichalcogenides (TMDCs) have recently attracted growing attention in the fields of dielectric nanophotonics because of their high refractive index and excitonic resonances. Despite the recent realizations of Mie resonances by patterning exfoliated TMDC flakes, it is still challenging to achieve large-scale TMDC-based photonic structures with a controllable thickness. Here, we report a bulk MoS₂ metaphotonic platform realized by a chemical vapor deposition (CVD) bottom-up method, supporting both pronounced dielectric optical modes and self-coupled polaritons. Magnetic surface lattice resonances (M-SLRs) and their energy-momentum dispersions are demonstrated in 1D MoS₂ gratings. Anticrossing behaviors with Rabi splitting up to 170 meV are observed when the M-SLRs are hybridized with the excitons in multilayer MoS₂. In addition, distinct Mie modes and anapole-exciton polaritons are also experimentally demonstrated in 2D MoS₂ disk arrays. We believe that the CVD bottom-up method would open up many possibilities to achieve large-scale TMDC-based photonic devices and enrich the toolbox of engineering exciton-photon interactions in TMDCs.