Polymer-based conductive membranes play an important role in the development of elastic deflection-based pressure sensors. In this paper, an analytical solution-based method is presented for the design and numerical calibration of polymer conductive membrane-based circular capacitive pressure sensors from non-touch mode of operation to touch mode of operation. The contact problem of a circular membrane in frictionless contact with a rigid flat plate under pressure is analytically solved, and its analytical solution is used for the design of touch mode circular capacitive pressure sensors for the first time. The analytical relationship with input pressure as independent variable and output capacitance as dependent variable is precisely derived and is used for the numerical calibrations of the analytical relationships with input capacitance as the independent variable and output pressure as the dependent variable in order to meet the capacitive pressure sensor mechanism of detecting pressure by measuring capacitance. For the first time, an example showing the design and numerical calibration of a given (given design parameters) polymer conductive membrane-based circular capacitive pressure sensor from non-touch mode of operation to touch mode of operation is provided. Then, the influence of changing several important design parameters on input capacitance-output pressure relationships is comprehensively investigated in order to clarify the desired input-output relationships when changing design parameters.
Keywords: analytical solution; capacitive pressure sensor; non-touch and touch mode of operation; numerical calibration; polymer conductive membrane.