Fabrication of Low-Cost Resistance Temperature Detectors and Micro-Heaters by Electrohydrodynamic Printing

Micromachines (Basel). 2022 Aug 28;13(9):1419. doi: 10.3390/mi13091419.

Abstract

EHD printing is an advanced deposition technology that is commonly utilized for the direct manufacture of electrical devices. In this study, meander-type resistive electrodes consisting of silver nanoparticles were printed directly on rigid glass and flexible polyethylene terephthalate (PET) substrates. High-resolution patterns of ≈50 µm linewidth were successfully printed on untreated surfaces utilizing a bigger nozzle of 100 µm inner diameter after improving the experimental settings. The manufactured electrodes were evaluated and used as Resistance Temperature Detectors (RTDs) and micro-heaters in a systematic manner. The temperature sensors performed well, with a Temperature Coefficient of Resistivity (TCRs) of 11.5 ×10-3/°C and 13.3 ×10-3/°C, for glass and PET substrates, respectively, throughout a wide temperature range of 100 °C and 90 °C. Furthermore, the RTDs had a quick response and recovery time, as well as minimal hysteresis. The electrodes' measured sensitivities as micro-heaters were 3.3 °C/V for glass and 6.8 °C/V for PET substrates, respectively. The RTDs were utilized for signal conditioning in a Wheatstone bridge circuit with a self-heating temperature of less than 1 °C as a practical demonstration. The micro-heaters have a lot of potential in the field of soft wearable electronics for biomedical applications, while the extremely sensitive RTDs have a lot of potential in industrial situations for temperature monitoring.

Keywords: Resistance Temperature Detectors (RTDs); additive manufacturing; electrohydrodynamic printing; inkjet; micro-fabrication; micro-heaters; printed sensors.

Grants and funding

This research received no external funding.