A small-volume highly-sensitive photoacoustic spectroscopy (PAS) methane detection system based on differential silicon cantilever optical microphones (SCOMs) is proposed and experimentally demonstrated. The system contains a compact non-resonant photoacoustic cell with a small volume of 1.2 mL and symmetrically-located dual SCOMs, as well as a distributed feedback laser at 1650.96 nm. The two identical SCOMs utilize the Fabry-Perot interferometric fiber-optic structure, with the differential Q-point demodulation algorithm to suppress the external vibration noise. Experimental results show that the SCOM has a high displacement sensitivity about 7.1 µm/Pa at 150 Hz and within 2.5 dB fluctuation between 5 Hz and 250 Hz. In the PAS gas sensing experiment, the normalized noise equivalent absorption coefficient of the PAS system is estimated to be 1.2 × 10-9 cm-1·W·Hz-1/2 and the minimum detection limit for methane is about 111.2 ppb with 1 s integration time. External disturbance is also applied to the dual SCOM system and results show excellent stability and noise resistance. The proposed PAS system exhibits superiorities of low gas consumption, high sensitivity and immunity to vibration and electromagnetic interference, which has an enormous potential in medicine, industry and environment.
Keywords: Gas detection; Optical microphone; Photoacoustic spectroscopy; Silicon cantilever.
© 2022 The Authors.