A battery-driven micro electromechanical system (MEMS) gas sensor has been developed for household safety when using natural gas. The heart of the MEMS gas sensor is a 7.5 at % Pt-SnO2 thin film catalyst deposited on the SnO2 sensor layer. The catalyst enhances the sensitivity to methane, though its structure under working conditions is unclear. In this study, in situ XAFS was applied to a 7.5 at % Pt-SnO2 catalyst layer deposited on a Si substrate, and we demonstrated that atomically dispersed Pt maintains its lattice position in SnO2 with a small loss of surrounding lattice oxygen in the presence of 1% CH4 and a more reducing gas of 1% H2 at the reaction temperature (703 K), i.e., no Pt aggregation is observed. The lost oxygen is easily recovered by re-oxidation by air. This work has revealed that the atomically dispersed Pt in the SnO2 lattice is the active structure and it is stable even under reaction conditions, which guarantees a long lifetime for the gas sensor.
Keywords: Pt−SnO2; in situ XAFS; micro gas sensor; reducing gas; solid-state.