The proton exchange membrane fuel cell (PEMFC) system is a highly efficient and environmentally friendly energy conversion technology. However, the local temperature, flow, and pressure inhomogeneity within the fuel cell during the electrochemical reaction process may lead to depletion of PEMFC material and uneven fuel distribution, thus affecting the performance and service life of high-temperature PEMFCs. In this study, micromachining technology is used to develop a three-in-one flexible micro-sensor that is resistant to a high-temperature electrochemical environment (120~200 °C). Appropriate materials and process parameters are used to protect the micro-sensor from failure or damage under long-term testing, and to conduct a real-time micro-monitor of the local temperature, flow, and pressure distribution inside high-temperature PEMFCs.
Keywords: high-temperature proton exchange membrane fuel cell; real-time micro-monitoring; three-in-one flexible micro-sensor.