Antenna miniaturization technology has been a challenging problem in the field of antenna design. The demand for antenna miniaturization is even stronger because of the larger size of the antenna in the low-frequency band. In this paper, we consider MEMS magnetoelectric antennas based on mechanical resonance, which sense the magnetic fields of electromagnetic waves through the magnetoelectric (ME) effect at their mechanical resonance frequencies, giving a voltage output. A 70 μm diameter cantilever disk with SiO2/Cr/Au/AlN/Cr/Au/FeGaB stacked layers is prepared on a 300 μm silicon wafer using the five-masks micromachining process. The MEMS magnetoelectric antenna showed a giant ME coefficient is 2.928 kV/cm/Oe in mechanical resonance at 224.1 kHz. In addition, we demonstrate the ability of this MEMS magnetoelectric antenna to receive low-frequency signals. This MEMS magnetoelectric antenna can provide new ideas for miniaturization of low-frequency wireless communication systems. Meanwhile, it has the potential to detect weak electromagnetic field signals.
Keywords: MEMS mechanical antenna; magnetoelectric coupling; microfabrication process.