Exploitation of distillation for energy-efficient and cost-effective environmentally benign process of waste solvents recovery from semiconductor industry

Abstract

The waste solvent is unavoidably generated from the high solvent dependable processes. One of them is the semiconductor industry. The waste solvent is frequently incinerated to eliminate hazardous waste and this practice raises the issue of environmental and treatment costs. Thus, recovery of waste solvent is a substantial environmental mitigation option. This study explores the recovery of multicomponent waste solvents from the semiconductor industry. To achieve a greener and energy-efficient process, the recovery process is proposed through investigation of mixture thermodynamic behavior, process design, optimization, economics, and integration of renewable energy for environmental advantages. Herein, Distillation, a practical technology option for solvent recovery, with green solvent for extractive distillation and a new approach using renewable energy in waste solvent recovery are explored. As the result, waste solvent recovery by distillation with conventional energy exhibits bold advantages to cost and lower carbon process compared to waste disposal. The integration of renewable energy with about 37 % share of conventional energy as the backup indicates the highest annual cost-saving and reduces about 89.4 % of annual carbon emission compared to carbon emission from waste disposal.

Keywords: Diethylene glycol monomethyl ether; Electronic grade semiconductor solvent; Extractive distillation; Greener waste solvent recovery; N-methyl-2-pyrrolidone; Renewable energy.