A hybrid YSZ/SnO2/MEMS SO2 gas sensor

Ting-Jen Hsueh; Chun-Liang Lu

doi:10.1039/c9ra03607e

A hybrid YSZ/SnO₂/MEMS SO₂ gas sensor

RSC Adv. 2019 Sep 4;9(48):27800-27806. doi: 10.1039/c9ra03607e. eCollection 2019 Sep 3.

Authors

Ting-Jen Hsueh¹, Chun-Liang Lu²

Affiliations

¹ Department of Electronic Engineering, National Kaohsiung University of Science and Technology Kaohsiung 807 Taiwan tj.hsueh@gmail.com.
² Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University Tainan 701 Taiwan.

Abstract

This study uses a solid YSZ electrolyte film in a SnO₂ MEMS SO₂ gas sensor of the semiconductor type to enhance the redox reaction. The YSZ film is prepared by RF sputtering. XRD analysis shows the presence of the (111), (200), (220) and (311) peaks that denote the crystallization planes of YSZ. The experimental results show that the SnO₂ MEMS SO₂ gas sensor with a YSZ film has a better sensor response than a pure SnO₂ MEMS SO₂ gas sensor or a YSZ MEMS SO₂ gas sensor when the SO₂ concentration and the sensor's temperature sensors are 250 ppb and 400 °C, respectively. The YSZ/SnO₂ sensor's measured responses are around 6%, 45%, 20% and 16% when the sensor is respectively operated at 250 °C, 300 °C, 350 °C, and 400 °C.