Image based evaluation of textured 3DSEM models

Tuomas Sihvonen; Satu-Pia Reinikainen

doi:10.1016/j.ultramic.2022.113518

Image based evaluation of textured 3DSEM models

Ultramicroscopy. 2022 Aug:238:113518. doi: 10.1016/j.ultramic.2022.113518. Epub 2022 Apr 2.

Authors

Tuomas Sihvonen¹, Satu-Pia Reinikainen²

Affiliations

¹ LUT University, Yliopistonkatu 34, Lappeenranta, Finland. Electronic address: tuomas.sihvonen@lut.fi.
² LUT University, Yliopistonkatu 34, Lappeenranta, Finland.

PMID: 35490533
DOI: 10.1016/j.ultramic.2022.113518

Abstract

Photogrammetric methods enable the construction of 3D SEM models from 2D images. Most software for this purpose is designed for photographic images. The software tries to minimize modelling error but some uncertainty usually remains in the model. In such approaches no ground truth measurement for microscopic objects exists for comparison with the finished model. In the proposed method, a textured model surface is compared to the SEM images to map the error locations on the model. The method is illustrated using two datasets.

Keywords: 3D SEM; Microscopy; Photogrammetry; Uncertainty.

MeSH terms

Imaging, Three-Dimensional* / methods
Photogrammetry* / methods
Software
Uncertainty