Highly sensitive and rapid responding humidity sensors based on silver catalyzed Ag2S-TiO2 quantum dots prepared by SILAR

Zu-Yin Deng; Ping-Chang Chiang; Kuen-Lin Chen; Jau-Han Chen; Chiu-Hsien Wu

doi:10.1039/d0ra09756j

Highly sensitive and rapid responding humidity sensors based on silver catalyzed Ag₂S-TiO₂ quantum dots prepared by SILAR

RSC Adv. 2021 Mar 10;11(17):10285-10290. doi: 10.1039/d0ra09756j. eCollection 2021 Mar 5.

Authors

Zu-Yin Deng¹, Ping-Chang Chiang¹, Kuen-Lin Chen^{1

2}, Jau-Han Chen³, Chiu-Hsien Wu^{1

2}

Affiliations

¹ Department of Physics, National Chung Hsing University Taichung 402 Taiwan chwu@phys.nchu.edu.tw +886-4-2286253 +886-4-22840427.
² Institute of Nano-Science, National Chung Hsing University Taichung 402 Taiwan.
³ Department of Materials Science and Engineering, Da-Yeh University Changhua 55 Taiwan.

Abstract

We developed a resistive humidity sensor based on a heterojunction of silver sulfide (Ag₂S) quantum dots (QDs) and TiO₂ because of its specificity to water vapor adsorption and its insensitivity to environmental gases. The QDs were grown on a mesoporous TiO₂ layer using the successive ionic layer adsorption and reaction (SILAR) method. The boundary condition between TiO₂ and Ag₂S provides a tunable energy gap by adjusting the number of SILAR cycles. Besides, the large surface-to-volume ratio of QDs provides a strong water vapor adsorption ability and electron transfer. Nano-silver precipitated during the SILAR process provides free electrons and lowers the Fermi level to between n-type TiO₂ and p-type Ag₂S. The resistance response increased significantly to 4600 and the reaction equilibrium time decreased greatly to 7 seconds due to the presence of nano-silver. Finally, the Ag₂S QDs possess a best sensing range of 13-90%. To sum up, Ag₂S QDs are high sensitivity and selectivity humidity sensors.