Equivalent Circuit Model Extraction for a SAW Resonator: Below and above Room Temperature

Sensors (Basel). 2022 Mar 26;22(7):2546. doi: 10.3390/s22072546.

Abstract

In this work, a SAW resonator is characterized in terms of admittance (Y-) parameters in the temperature range spanning from 0 °C to 100 °C, with the aim of highlighting how its physical properties are affected by the temperature change. A lumped-element equivalent-circuit model is used to represent the device under test at the considered temperature conditions and a parameters extraction process based on a Lorentzian fitting is developed for the determination of the equivalent-circuit elements in the investigated temperature range. A very good agreement is observed between the performed measurements and the model simulations. The characterization process and the subsequent equivalent-circuit parameters extraction at different temperature values are described and discussed.

Keywords: Lorentzian fitting; admittance parameters; curve fitting; electrical characterization; resonance; surface acoustic wave resonators; temperature.