Symmetrically Ion-Gated In-Plane Metal-Oxide Transistors for Highly Sensitive and Low-Voltage Driven Bioelectronics

Adv Sci (Weinh). 2022 May;9(13):e2103275. doi: 10.1002/advs.202103275. Epub 2022 Mar 3.

Abstract

To provide a unique opportunity for on-chip scaled bioelectronics, a symmetrically gated metal-oxide electric double layer transistor (EDLT) with ion-gel (IG) gate dielectric and simple in-plane Corbino electrode architecture is proposed. Using amorphous indium-gallium-zinc oxide (a-IGZO) semiconductor and IG dielectric layers, low-voltage driven EDLTs with high ionotronic effects can be realized. More importantly, in contrast to the conventional asymmetric rectangular EDLTs which can cause non-uniform potential variation in the active channel layer and eventually degrade the sensing performance, the new symmetrical in-plane type EDLTs achieve high and spatially uniform ion responsive behaviors. The symmetrically gated a-IGZO EDLTs exhibited a responsivity of 129.4% to 5 ppm mercury (Hg2+ ) ions which are approximately three times higher than that with conventional electrode structure (responsivity of 38.5%). To confirm the viability of the new device architectures and the findings, the detailed mechanism of the symmetric gating effects in the in-plane EDLTs with a variety of electrical characterization and 3D fine element analysis simulations is also discussed.

Keywords: amorphous oxide semiconductors; electric double layer; ion-gel; monolithic passivation; symmetrically gated structure; thin-film transistor.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Ions / chemistry
  • Oxides / chemistry
  • Semiconductors
  • Transistors, Electronic*
  • Zinc / chemistry
  • Zinc Oxide* / chemistry

Substances

  • Ions
  • Oxides
  • Zinc
  • Zinc Oxide