Comparison of NH3 and N2O Plasma Treatments on Bi2O3 Sensing Membranes Applied in an Electrolyte-Insulator-Semiconductor Structure

Chyuan-Haur Kao; Kuan-Lin Chen; Yi-Shiang Chiu; Lin Sang Hao; Shih-Ming Chen; Ming-Hsien Li; Ming-Ling Lee; Hsiang Chen

doi:10.3390/membranes12020188

Comparison of NH₃ and N₂O Plasma Treatments on Bi₂O₃ Sensing Membranes Applied in an Electrolyte-Insulator-Semiconductor Structure

Membranes (Basel). 2022 Feb 5;12(2):188. doi: 10.3390/membranes12020188.

Authors

Chyuan-Haur Kao^{1

2

3}, Kuan-Lin Chen¹, Yi-Shiang Chiu⁴, Lin Sang Hao⁴, Shih-Ming Chen⁴, Ming-Hsien Li⁴, Ming-Ling Lee⁵, Hsiang Chen⁴

Affiliations

¹ Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan District, Taoyuan City 333, Taiwan.
² Kidney Research Center, Department of Nephrology, Chang Gung Memorial Hospital, Chang Gung University, No. 5 Fuxing Street, Guishan District, Taoyuan City 333, Taiwan.
³ Department of Electronic Engineering, Ming Chi University of Technology, 284 Gungjuan Road, Taishan District, New Taipei City 243, Taiwan.
⁴ Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, Taiwan.
⁵ Department of Electro-Optical Engineering, Minghsin University of Science and Technology, No. 1, Xinxing Road, Xinfeng, Hsinchu 30401, Taiwan.

Abstract

In this study, bismuth trioxide (Bi₂O₃) membranes in an electrolyte-insulator-semiconductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing performance, the membranes were treated with two types of plasma-NH₃ and N₂O. To investigate the material property improvements, multiple material characterizations were conducted. Material analysis results indicate that plasma treatments with appropriate time could enhance the crystallization, remove the silicate and facilitate crystallizations. Owing to the material optimizations, the pH sensing capability could be greatly boosted. NH₃ or N₂O plasma treated-Bi₂O₃ membranes could reach the pH sensitivity around 60 mV/pH and show promise for future biomedical applications.

Keywords: NH3 and N2O; bismuth trioxide; grainization; nitrogen passivation; plasma treatment.

Grants and funding

110-2221-E-260-006-/Ministry of Science and Technology (MOST), Taiwan