Robust growth of two-dimensional metal dichalcogenides and their alloys by active chalcogen monomer supply

Yonggang Zuo; Can Liu; Liping Ding; Ruixi Qiao; Jinpeng Tian; Chang Liu; Qinghe Wang; Guodong Xue; Yilong You; Quanlin Guo; Jinhuan Wang; Ying Fu; Kehai Liu; Xu Zhou; Hao Hong; Muhong Wu; Xiaobo Lu; Rong Yang; Guangyu Zhang; Dapeng Yu; Enge Wang; Xuedong Bai; Feng Ding; Kaihui Liu

doi:10.1038/s41467-022-28628-7

Robust growth of two-dimensional metal dichalcogenides and their alloys by active chalcogen monomer supply

Nat Commun. 2022 Feb 23;13(1):1007. doi: 10.1038/s41467-022-28628-7.

Authors

Yonggang Zuo^#^{1

2

3}, Can Liu^#^{4

5}, Liping Ding^#⁶, Ruixi Qiao^#⁷, Jinpeng Tian², Chang Liu⁷, Qinghe Wang¹, Guodong Xue¹, Yilong You¹, Quanlin Guo¹, Jinhuan Wang¹, Ying Fu⁸, Kehai Liu⁸, Xu Zhou⁹, Hao Hong¹, Muhong Wu^{7

10}, Xiaobo Lu⁷, Rong Yang², Guangyu Zhang², Dapeng Yu¹¹, Enge Wang^{7

8

12}, Xuedong Bai^{13

14}, Feng Ding¹⁵, Kaihui Liu^{16

17

18}

Affiliations

¹ State Key Laboratory for Mesoscopic Physics, Frontiers Science Centre for Nano-optoelectronics, School of Physics, Peking University, 100871, Beijing, China.
² Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, 100190, Beijing, China.
³ The Key Laboratory of Unconventional Metallurgy, Ministry of Education, Faculty of Metallurgical and Energy Engineering, Kunming University of Science and Technology, Kunming, 650093, Yunnan, China.
⁴ State Key Laboratory for Mesoscopic Physics, Frontiers Science Centre for Nano-optoelectronics, School of Physics, Peking University, 100871, Beijing, China. canliu@pku.edu.cn.
⁵ Department of Physics and Beijing Key Laboratory of Opto-electronic Functional Materials&Micro-nano Devices, Renmin University of China, 100872, Beijing, China. canliu@pku.edu.cn.
⁶ Centre for Multidimensional Carbon Materials, Institute for Basic Science, Ulsan, 44919, South Korea.
⁷ International Centre for Quantum Materials, Collaborative Innovation Center of Quantum Matter, Peking University, 100871, Beijing, China.
⁸ Songshan Lake Materials Laboratory, Dongguan, 523808, Guangdong, China.
⁹ School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou, 510006, Guangdong, China.
¹⁰ Interdisciplinary Institute of Light-Element Quantum Materials and Research Centre for Light-Element Advanced Materials, Peking University, 100871, Beijing, China.
¹¹ Shenzhen Institute for Quantum Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, Guangdong, China.
¹² School of Physics, Liaoning University, Liaoning, 110136, Shenyang, China.
¹³ Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, 100190, Beijing, China. xdbai@iphy.ac.cn.
¹⁴ Songshan Lake Materials Laboratory, Dongguan, 523808, Guangdong, China. xdbai@iphy.ac.cn.
¹⁵ Centre for Multidimensional Carbon Materials, Institute for Basic Science, Ulsan, 44919, South Korea. f.ding@unist.ac.kr.
¹⁶ State Key Laboratory for Mesoscopic Physics, Frontiers Science Centre for Nano-optoelectronics, School of Physics, Peking University, 100871, Beijing, China. khliu@pku.edu.cn.
¹⁷ International Centre for Quantum Materials, Collaborative Innovation Center of Quantum Matter, Peking University, 100871, Beijing, China. khliu@pku.edu.cn.
¹⁸ Songshan Lake Materials Laboratory, Dongguan, 523808, Guangdong, China. khliu@pku.edu.cn.

^# Contributed equally.

Abstract

The precise precursor supply is a precondition for controllable growth of two-dimensional (2D) transition metal dichalcogenides (TMDs). Although great efforts have been devoted to modulating the transition metal supply, few effective methods of chalcogen feeding control were developed. Here we report a strategy of using active chalcogen monomer supply to grow high-quality TMDs in a robust and controllable manner, e.g., MoS₂ monolayers perform representative photoluminescent circular helicity of ~92% and electronic mobility of ~42 cm²V^-1s^-1. Meanwhile, a uniform quaternary TMD alloy with three different anions, i.e., MoS_2(1-x-y)Se_2xTe_2y, was accomplished. Our mechanism study revealed that the active chalcogen monomers can bind and diffuse freely on a TMD surface, which enables the effective nucleation, reaction, vacancy healing and alloy formation during the growth. Our work offers a degree of freedom for the controllable synthesis of 2D compounds and their alloys, benefiting the development of high-end devices with desired 2D materials.

Abstract

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