Programmable patterned MoS2 film by direct laser writing for health-related signals monitoring

Manzhang Xu; Jiuwei Gao; Juncai Song; Hanxin Wang; Lu Zheng; Yuan Wei; Yongmin He; Xuewen Wang; Wei Huang

doi:10.1016/j.isci.2021.103313

Programmable patterned MoS₂ film by direct laser writing for health-related signals monitoring

iScience. 2021 Oct 16;24(11):103313. doi: 10.1016/j.isci.2021.103313. eCollection 2021 Nov 19.

Authors

Manzhang Xu^{1

2

3}, Jiuwei Gao¹, Juncai Song¹, Hanxin Wang¹, Lu Zheng^{1

2

3}, Yuan Wei^{1

2

3}, Yongmin He⁴, Xuewen Wang^{1

2

3}, Wei Huang^{1

2

3

5

6}

Affiliations

¹ Frontiers Science Center for Flexible Electronics and Xi'an Institute of Flexible Electronics (IFE), Northwestern Polytechnical University, Xi'an 71002, P. R. China.
² MIIT Key Laboratory of Flexible Electronics (KLoFE), Northwestern Polytechnical University, Xi'an 710072, P. R. China.
³ Shaanxi Key Laboratory of Flexible Electronics (KLoFE), Northwestern Polytechnical University, Xi'an 710072, P. R. China.
⁴ State Key Laboratory of Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha 410082, P. R. China.
⁵ State Key Laboratory of Organic Electronics and Information Displays, Institute of Advanced Materials (IAM), Nanjing University of Posts & Telecommunications, Nanjing 210023, P. R. China.
⁶ Key Laboratory of Flexible Electronics (KLoFE) and Institute of Advanced Materials (IAM), Nanjing Tech University, Nanjing 211800, P. R. China.

Abstract

The two-dimensional (2D) transition metal dichalcogenides (TMDs) are promising flexible electronic materials for strategic flexible information devices. Large-area and high-quality patterned materials were usually required by flexible electronics due to the limitation from the process of manufacturing and integration. However, the synthesis of large-area patterned 2D TMDs with high quality is difficult. Here, an efficient and powerful pulsed laser has been developed to synthesize wafer-scale MoS₂. The flexible strain sensor was fabricated using MoS₂ and showed high performance of low detection limit (0.09%), high gauge factor (1,118), and high stability (1,000 cycles). Besides, we demonstrated its applications in real-time monitoring of health-related physiological signals such as radial artery pressure, respiratory rate, and vocal cord vibration. Our findings suggest that the laser-assisted method is effective and capable of synthesizing wafer-scale 2D TMDs, which opens new opportunities for the next flexible electronic devices and wearable health monitoring.

Keywords: Nanomaterials; Physics; Sensor system.