Two-Dimensional Perovskite Crystals Formed by Atomic Layer Deposition of CaTiO3 on γ-Al2O3

Tianyu Cao; Ohhun Kwon; Chao Lin; John M Vohs; Raymond J Gorte

doi:10.3390/nano11092207

Two-Dimensional Perovskite Crystals Formed by Atomic Layer Deposition of CaTiO₃ on γ-Al₂O₃

Nanomaterials (Basel). 2021 Aug 27;11(9):2207. doi: 10.3390/nano11092207.

Authors

Tianyu Cao¹, Ohhun Kwon¹, Chao Lin¹, John M Vohs¹, Raymond J Gorte¹

Affiliation

¹ Department of Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, PA 19104, USA.

Abstract

CaTiO₃ films with an average thickness of 0.5 nm were deposited onto γ-Al₂O₃ by Atomic Layer Deposition (ALD) and then characterized by a range of techniques, including X-ray Diffraction (XRD) and High-Resolution, Transmission Electron Microscopy (HRTEM). The results demonstrate that the films form two-dimensional crystallites over the entire surface. Lattice fringes from HRTEM indicate that the crystallites range in size from 5 to 20 nm and are oriented in various directions. Films of the same thickness on SiO₂ remained amorphous, indicating that the support played a role in forming the crystallites.

Keywords: atomic layer deposition; crystallization; perovskites; thin films.

Abstract

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