In this study, we developed a high-resolution, more accurate, non-destructive apparatus for refining the detection of electrode pixels in a thin-film-transistor liquid-crystal display (TFT-LCD). The hybrid optoelectronic apparatus simultaneously uses an array tester linked with the automatic optical inspection of panel defects. Unfortunately, due to a tiny air gap in the electro-optical inspector, the situation repeatedly causes numerous scratches and damages to the modulator; therefore, developing alternative equipment is necessary. Typically, in TFT-LCDs, there are open, short, and cross short electrical defects. The experiment utilized a multiple-line scan with the time delay integration (TDI) of a charge-coupled device (CCD) to capture a sharp image, even under low light, various speeds, or extreme conditions. In addition, we explored the experimental efficacy of detecting the electrode pixel of the samples and evaluated the effectiveness of a 7-inch opaque quartz mask. The results show that an array tester and AOI can detect a TFT-LCD electrode pixel sufficiently; therefore, we recommend adopting the hybrid apparatus in the TFT-LCD industry.
Keywords: array tester; optical inspection; optoelectronic apparatus; thin-film-transistor liquid-crystal display (TFT-LCD); time delay integration charge-coupled device (TDI-CCD).