Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

Dongpeng Zhang; Anjiang Cai; Yulong Zhao; Tengjiang Hu

doi:10.3390/mi12060622

Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

Micromachines (Basel). 2021 May 27;12(6):622. doi: 10.3390/mi12060622.

Authors

Dongpeng Zhang^{1

2}, Anjiang Cai^{1

2}, Yulong Zhao³, Tengjiang Hu³

Affiliations

¹ School of Mechanical and Electrical Engineering, Xi'an University of Architecture and Technology, Xi'an 710055, China.
² Shaanxi Key Laboratory of Nano Materials and Technology, Xi'an 710055, China.
³ State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Abstract

The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the MEMS actuator model by using the BP neural network, which effectively reduces the error between ANSYS simulation results and experimental results to less than 1%. Meanwhile, the V-shaped electro-thermal MEMS actuator model, with the human error factor included, will become more accurate as the database of the V-shaped electro-thermal actuator model grows.

Keywords: BP neural network; electro-thermal actuator; fuzzy mathematics calculation model; human error factor; macro modeling.