Gadolinia doped ceria coatings were elaborated by cathodic arc evaporation from a metallic Ce-Gd (90-10 at.%) target inserted into a conventional multiarc Ti evaporation target in the presence of a reactive argon-oxygen gas mixture. The structural and chemical features of these films were determined by x-ray diffraction and scanning electron microscopy. Their electrical properties were characterized using impedance spectroscopy measurements. It was shown that the as-deposited coatings crystallize in the fluorite type fcc structure of ceria and that their composition is the same as that of the target. The morphology of the coatings is influenced by the evaporation parameter (stress and droplet). The electrical measurements showed two contributions in Nyquist representation and the activation energy was slightly higher than that given in the literature data for the bulk material.
Keywords: arc cathodic; gadolinia doped ceria; thin film.