Design of Piezoelectric Ultrasonic Transducer Based on Doped PDMS

Sensors (Basel). 2021 Apr 30;21(9):3123. doi: 10.3390/s21093123.

Abstract

The performance of the ultrasonic transducer will directly affect the accuracy of ultrasonic experimental measurement. Therefore, in order to meet the requirements of a wide band, a kind of annular 2-2-2 piezoelectric composite is proposed based on doped PDMS. In this paper, the transducer structure consisted of PZT-5A piezoelectric ceramics and PDMS doped with 3 wt.% Al2O3:SiO2 (1:6) powder, which constituted the piezoelectric composite. MATLAB and COMSOL software were used for simulation. Meanwhile, the electrode materials were selected. Then, the performance of the designed annular 2-2-2 ultrasonic transducer was tested. The simulation results show that when the polymer phase material of the piezoelectric ultrasonic transducer is doped PDMS, the piezoelectric phase and the ceramic substrate account for 70% of the total volume, the polymer phase accounts for 30% of the total volume, and the maximum frequency band width can reach 90 kHz. The experimental results show that the maximum bandwidth of -3 dB can reach 104 kHz when the frequency is 160 kHz. The results of the electrode test show that the use of Cu/Ti electrode improves the electrical conductivity of the single electrode. In this paper, the annular 2-2-2 transducer designed in the case of small volume had the characteristics of a wide frequency band, which was conducive to the miniaturization and integration of the transducer. Therefore, we believe that the annular 2-2-2 piezoelectric composite has broad application prospects.

Keywords: 2-2 piezoelectric composites; PDMS; ultrasonic transducer; ultrasonic wave.