The research focused on materials having potential applications in technology of planar evanescent wave sensors. Four samples of binary SiO2:TiO2 thin films having different titania content were manufactured through the sol-gel method and dip-coating technique on polished silicon substrates. The samples were subjected to repeated heating/cooling protocols. Simultaneously, their optical parameters were monitored by spectroscopic ellipsometry as they evolved under varying temperature. Subsequent analysis confirmed linear dependence of refractive index on titania content, at least in vis-NIR wavelengths, as well as a low value of the thermal expansion coefficient. It was shown that the thickness of SiO2:TiO2 films decreased as a result of annealing processes, which may be a consequence of reduced porosity.
Keywords: refractive index; silica-titania film; slab waveguide; sol-gel method; spectroscopic ellipsometry; thin film.