Fabrication of Functional Microdevices in SU-8 by Multi-Photon Lithography

Pooria Golvari; Stephen M Kuebler

doi:10.3390/mi12050472

Fabrication of Functional Microdevices in SU-8 by Multi-Photon Lithography

Micromachines (Basel). 2021 Apr 21;12(5):472. doi: 10.3390/mi12050472.

Authors

Pooria Golvari¹, Stephen M Kuebler^{1

2

3}

Affiliations

¹ Chemistry Department, University of Central Florida, Orlando, FL 32816, USA.
² CREOL, The College of Optics and Photonics, University of Central Florida, Orlando, FL 32816, USA.
³ Department of Material Science and Engineering, University of Central Florida, Orlando, FL 32816, USA.

Abstract

This review surveys advances in the fabrication of functional microdevices by multi-photon lithography (MPL) using the SU-8 material system. Microdevices created by MPL in SU-8 have been key to progress in the fields of micro-fluidics, micro-electromechanical systems (MEMS), micro-robotics, and photonics. The review discusses components, properties, and processing of SU-8 within the context of MPL. Emphasis is focused on advances within the last five years, but the discussion also includes relevant developments outside this period in MPL and the processing of SU-8. Novel methods for improving resolution of MPL using SU-8 and discussed, along with methods for functionalizing structures after fabrication.

Keywords: MEMS; SU-8; direct laser writing; metallization; micro-fluidics; micro-robotics; multi-photon lithography.

Publication types

Review

Grants and funding

1711356/National Science Foundation