1 Key Laboratory of Optoelectronic Technology and System of Ministry of Education, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China.
2 Key Laboratory of Fundamental Science Micro/Nano Device System Technology, Micro System Research Center of Chongqing University, Chongqing 400044, China.
3 Intelligent Manufacturing Technology Institute, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China.
4 Chongqing Academy of Metrology and Quality Inspection, Chongqing 401121, China.