Mapping of the local lattice distortion is required to understand the details of the chemical and physical properties of thin films. However, the resolution by the direct microscopic methods was insufficient to detect the local distortion. Here, we have demonstrated that the local distortion of a monatomic film on a substrate is estimated with high resolution using the moiré pattern of the topographic scanning tunneling microscopy image. The analysis focused on the apparently low centers of the moiré pattern of the hexagonal iron nitride monolayer on the Cu(111) substrate. The local distortion was visualized by estimating the displacement of the experimentally detected center position from the ideal position that is extracted from the adjacent center positions. The map of the local distortion revealed that the subsurface impurities are preferentially located on the largely distorted areas. This approach is widely applicable to other thin films on the substrates.
Keywords: STM; iron nitride; moiré pattern; monatomic layer; subatomic scale distortion.