Laser Nanostructuring for Diffraction Grating Based Surface Plasmon-Resonance Sensors

Iaroslav Gnilitskyi; Sergii V Mamykin; Christina Lanara; Ihor Hevko; Mykhaylo Dusheyko; Stefano Bellucci; Emmanuel Stratakis

doi:10.3390/nano11030591

Laser Nanostructuring for Diffraction Grating Based Surface Plasmon-Resonance Sensors

Nanomaterials (Basel). 2021 Feb 26;11(3):591. doi: 10.3390/nano11030591.

Authors

Iaroslav Gnilitskyi^{1

2}, Sergii V Mamykin³, Christina Lanara^{4

5}, Ihor Hevko¹, Mykhaylo Dusheyko⁶, Stefano Bellucci⁷, Emmanuel Stratakis^{4

5}

Affiliations

¹ NoviNano Inc., 79021 Lviv, Ukraine.
² Department of Photonics, Lviv Polytechnic National University, 79021 Lviv, Ukraine.
³ V. E. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, 02000 Kyiv, Ukraine.
⁴ Foundation for Research and Technology-Hellas (F.O.R.T.H.), Institute of Electronic Structure and Laser (I.E.S.L.), 70013 Heraklion, Greece.
⁵ Department of Materials Science and Technology, University of Crete, 70013 Heraklion, Greece.
⁶ Kiev Polytechnic Institute, National Technical University of Ukraine, 03056 Kyiv, Ukraine.
⁷ INFN-Laboratori Nazionali di Frascati, 00044 Frascati, Italy.

Abstract

The surface plasmon resonance properties of highly regular laser-induced periodic surface structures (HR-LIPSSs) on Si, functionalized with Au nanoparticles (NPs), were investigated. In particular, the spectral dependencies of polarized light reflectance at various angles of incidence were measured and discussed. It is found that the deposition of Au NPs on such periodically textured substrates leads to significant enhancement of the plasmon resonance properties, compared to that measured on planar ones. This effect can be used to improve the efficiency of localized-plasmon-resonance-based sensors.

Keywords: HR-LIPSS; femtosecond laser; laser nanostructuring; laser-induced periodic surface structures; plasmonic nanoparticles; silicon; surface plasmon resonance; ultrafast laser ablation.