To reduce the impact of acoustic interference in a microelectromechanical system (MEMS) gyroscope and to improve the reliability of output data, a filtering algorithm based on orthogonal demodulation is proposed. According to the working principle and failure mechanism of a MEMS gyroscope, the sound and angular velocity frequencies are not identical, which lead to a different frequency signal output of the original single-channel demodulation scheme. Therefore, a Q channel demodulation filtering process was added to the origin single-channel demodulation scheme. For the Q channel demodulated signal, a Hilbert transform was used to compensate for the 90 degree phase shift. The IQ dual-channel difference can remove the acoustic interference signal. The simulation results indicate that the scheme can effectively suppress the acoustic interference signal and it can eliminate more than 95% of the impact of sound waves. We assembled the acoustic interference experimental platform, collected the driving and sensing data, and verified the denoising performance with our algorithm, which eliminated more than 70% of the noise signal. The simulation and experimental results demonstrate that the scheme can eliminate acoustic interference signal without destroying angular velocity signal.
Keywords: MEMS gyroscope; acoustic interference; orthogonal demodulation.