Micro-hole arrays have found wide applications in aerospace, precision instruments, and biomedicine. Among various methods of their production, including mechanical, laser, and electrical discharge, electrochemical machining (ECM) is considered the most lucrative due to its wide processing range, high surface quality, and excellent productivity. In particular, ultrasound-assisted through-mask ECM exhibits an enhanced machining precision due to ultrasonic cavitation, which promotes the removal of the electrolytic products and bubbles. In this study, the equation of cavitation bubble oscillation was derived and numerically solved to study the influence of six different parameters on the ultrasonic cavitation and electrolysis process, and their optimal values were determined. The feasibility of the proposed ultrasound-assisted through-mask ECM technology with the optimized parameters was experimentally corroborated by the fabrication of a high-quality hole array in an oxide dispersion strengthened (ODS) MA956 superalloy.
Keywords: ODS superalloy; cavitation; hole array; ultrasound-assisted through-mask ECM.