HAADF-STEM tomography is a widely used experimental technique for analyzing nanometer-scale structures of a large variety of materials in three dimensions. It is especially useful for studying crystalline nanoparticles, where conventional TEM tomography suffers from diffraction-related artefacts. Unfortunately, the acquisition of a HAADF-STEM tilt series can easily take up one hour or more, depending on the complexity of the experiment. It is therefore challenging to investigate samples that do not withstand long electron beam illumination or to acquire a large number of tilt series during a single TEM experiment. The latter would facilitate obtaining more statistically representative 3D data, and enable performing dynamic in situ 3D characterizations with a finer time resolution. Various HAADF-STEM acquisition strategies have been proposed to accelerate the tomographic acquisition and reduce the required electron dose. These methods include tilting the holder continuously while acquiring a projection "movie" and a hybrid, incremental, methodology which combines the benefits of the conventional and continuous technique. However, until now an experimental evaluation of these techniques has been lacking. In this paper, the different acquisition strategies will be experimentally compared in terms of speed, resolution and electron dose. This evaluation will be performed based on experimental tilt series, acquired for various metallic nanoparticles with different shapes and sizes. We discuss the necessary data processing and provide a general guideline that can be used to determine the most optimal acquisition strategy for specific electron tomography experiments.
Keywords: Electron dose reduction; Electron tomography; Fast tomography; HAADF-STEM; High throughput.
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