Atom probe tomography (APT), a 3D microscopy technique, has great potential to reveal atomic scale compositional variations, such as those associated with irradiation damage. However, obtaining accurate compositional quantification by APT for high bandgap materials is a longstanding challenge, given the sensitivity to field evaporation parameters and inconsistent behaviors across different oxides. This study investigates the influence of APT laser energy and specimen base temperature on compositional accuracy in single crystal thoria (ThO2). ThO2 has a broad range of applications, including advanced nuclear fuels, sensors, lasers and scintillators, electrodes, catalysis, and photonics and optoelectronics. The expected stoichiometry of ThO2 is achieved at APT base temperature of 24 K and laser energy of 100 pJ. To overcome mass resolution limitations associated with significant thermal tails, Bayesian methods are applied to deconvolute ion identity within the mass spectra. This approach affirms that the parameters chosen are appropriate for APT analysis of ThO2.
Keywords: Atom probe tomography; Mass spectrum; Oxides; Stoichiometry; Thermal tails; Thorium dioxide.
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