Fabricating flexible pressure sensors with high sensitivity in a broad pressure range is still a challenge. Herein, a flexible pressure sensor with engineered microstructures on polydimethylsiloxane (PDMS) film is designed. The high performance of the sensor derives from its unique pyramid-wall-grid microstructure (PWGM). A square array of dome-topped pyramids and crossed strengthening walls on the film forms a multiheight hierarchical microstructure. Two pieces of PWGM flexible PDMS film, stacked face-to-face, form a piezoresistive sensor endowed with ultrahigh sensitivity across a very broad pressure range. The sensitivity of the device is as high as 383 665.9 and 269 662.9 kPa-1 in the pressure ranges 0-1.6 and 1.6-6 kPa, respectively. In the higher pressure range of 6.1-11 kPa, the sensitivity is 48 689.1 kPa-1, and even in the very high pressure range of 11-56 kPa, it stays at 1266.8 kPa-1. The pressure sensor possesses excellent bending and torsional strain detection properties, is mechanically durable, and has potential applications in wearable biosensing for healthcare. In addition, 2 × 2 and 4 × 4 sensor arrays are prepared and characterized, suggesting the possibility of manufacturing a flexible tactile sensor.
Keywords: engineered microstructures; flexible tactile sensors; hierarchical deformation modes; highest sensitivity; piezoresistive pressure sensors.
© 2020 The Authors. Published by Wiley‐VCH GmbH.