High-performance extended-gate ion-sensitive field-effect transistors with multi-gate structure for transparent, flexible, and wearable biosensors

Abstract

In this study, we developed a high-performance extended-gate ion-sensitive field-effect transistor (EG-ISFET) sensor on a flexible polyethylene naphthalate (PEN) substrate. The EG-ISFET sensor comprises a tin dioxide (SnO₂) extended gate, which acts as a detector, and an amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistor (TFT) for a transducer. In order to self-amplify the sensitivity of the pH sensors, we designed a uniquely-structured a-IGZO TFT transducer with a high-k engineered top gate insulator consisting of a silicon dioxide/tantalum pentoxide (SiO₂/Ta₂O₅) stack, a floating layer under the channel, and a control gate coplanar with the channel. The SiO₂/Ta₂O₅ stacked top gate insulator and in-plane control gate significantly contribute to capacitive coupling, enabling the amplification of sensitivity to be enlarged compared to conventional dual-gate transducers. For a pH sensing method suitable for EG-ISFET sensors, we propose an in-plane control gate (IG) sensing mode, instead of conventional single-gate (SG) or dual-gate (DG) sensing modes. As a result, a pH sensitivity of 2364 mV/pH was achieved at room temperature - this is significantly superior to the Nernstian limit (59.15 mV/pH at room temperature). In addition, we found that non-ideal behavior was improved in hysteresis and drift measurements. Therefore, the proposed transparent EGISFFET sensor with an IG sensing mode is expected to become a promising platform for flexible and wearable biosensing applications.

Keywords: 102 Porous / Nanoporous / Nanostructured materials; 208 Sensors and actuators; 306 Thin film / Coatings; Extended-gate ion-sensitive field-effect transistor; capacitive coupling; flexible; high-k engineered gate oxide; in-plane control gate; polyethylene naphthalate.