The nanoresolution of geometric phase elements for visible wavelengths calls for a flexible technology with high throughout and free from vacuum. In this article, we propose a high-efficiency and simple manufacturing method for the fabrication of geometric phase elements with femtosecond-laser direct writing (FsLDW) and thermal annealing by combining the advantages of high-efficiency processing and thermal smoothing effect. By using a femtosecond laser at a wavelength of 343 nm and a circular polarization, free-form nanogratings with a period of 300 nm and 170-nm-wide grooves were obtained in 50 s by laser direct ablation at a speed of 5 mm/s in a non-vacuum environment. After fine-tuning through a hot-annealing process, the surface morphology of the geometric phase element was clearly improved. With this technology, we fabricated blazed gratings, metasurface lens, vortex Q-plates and "M" holograms and confirmed the design performance by analyzing their phases at the wavelength of 808 nm. The efficiency and capabilities of our proposed method can pave the possible way to fabricate geometric phase elements with essentially low loss, high-temperature resistance, high phase gradients and novel polarization functionality for potentially wide applications.
Keywords: annealing technology; femtosecond laser; geometric phase elements; nanofabrication.