In-situ interferometric monitoring of optical coatings

Opt Express. 2020 Jul 20;28(15):22012-22026. doi: 10.1364/OE.394953.

Abstract

We present a new method for the in situ measurement of the amplitude and phase of the reflection coefficient of a plane substrate installed in a mechanical holder rotating at high speed (120 turns per minute) during the deposition of optical thin films. Our method is based on digital holography and uses a self-referenced scheme to cancel the effects of the severe constraints generated by the vibrational and thermal environment of the deposition machine.