Optofluidic Formaldehyde Sensing: Towards On-Chip Integration

Micromachines (Basel). 2020 Jul 10;11(7):673. doi: 10.3390/mi11070673.

Abstract

Formaldehyde (HCHO), a chemical compound used in the fabrication process of a broad range of household products, is present indoors as an airborne pollutant due to its high volatility caused by its low boiling point ( T = - 19 °C). Miniaturization of analytical systems towards palm-held devices has the potential to provide more efficient and more sensitive tools for real-time monitoring of this hazardous air pollutant. This work presents the initial steps and results of the prototyping process towards on-chip integration of HCHO sensing, based on the Hantzsch reaction coupled to the fluorescence optical sensing methodology. This challenge was divided into two individually addressed problems: (1) efficient airborne HCHO trapping into a microfluidic context and (2) 3,5-diacetyl-1,4-dihydrolutidine (DDL) molecular sensing in low interrogation volumes. Part (2) was addressed in this paper by proposing, fabricating, and testing a fluorescence detection system based on an ultra-low light Complementary metal-oxide-semiconductor (CMOS) image sensor. Two three-layer fluidic cell configurations (quartz-SU-8-quartz and silicon-SU-8-quartz) were tested, with both possessing a 3.5 µL interrogation volume. Finally, the CMOS-based fluorescence system proved the capability to detect an initial 10 µg/L formaldehyde concentration fully derivatized into DDL for both the quartz and silicon fluidic cells, but with a higher signal-to-noise ratio (SNR) for the silicon fluidic cell ( S N R s i l i c o n = 6.1 ) when compared to the quartz fluidic cell ( S N R q u a r t z = 4.9 ). The signal intensity enhancement in the silicon fluidic cell was mainly due to the silicon absorption coefficient at the excitation wavelength,   a ( λ a b s = 420   nm ) = 5 × 10 4   cm - 1 , which is approximately five times higher than the absorption coefficient at the fluorescence emission wavelength, a ( λ e m = 515   nm ) = 9.25 × 10 3   cm - 1 .

Keywords: 3,5–diacetyl-1,4-dihydrolutidine (DDL); SU-8 2015 waveguide; light emitting diode (LED)-induced fluorescence; metal-oxide-semiconductor (CMOS)-based fluorescence sensing; silicon fluidic cell.